Energy dispersive X-ray spectroscopy wit
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Hollerith, C.; Wernicke, D.; BΓΒΌhler, M.; Feilitzsch, F.v.; Huber, M.; HΓΒΆhne, J
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Article
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2004
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Elsevier Science
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English
β 317 KB
Shrinking feature sizes in semiconductor device production as well as the use of new materials demand innovation in device technology and material analysis. X-ray spectrometers based on superconducting sensor technology are currently closing the gap between fast energy dispersive spectroscopy (EDS)