Three-dimensional nanometric sub-surface imaging of a silicon flip-chip using the two-photon optical beam induced current method

✍ Scribed by E. Ramsay; K.A. Serrels; M.J. Thomson; A.J. Waddie; R.J. Warburton; M.R. Taghizadeh; D.T. Reid

• Book ID: 108210740
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 728 KB
• Volume: 47
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/j.microrel.2007.07.069