Functional Imaging: Three-Dimensional Imaging of Diffusion Volumes in Silicon Circuits by Use of the Two- Photon Optical-Beam- Induced Current Effect

✍ Scribed by Reid, D. T.; Ramsay, E.; Wilsher, K.

• Book ID: 115436993
• Publisher: Optical Society of America
• Year: 2002
• Tongue: English
• Weight: 49 KB
• Volume: 13
• Category: Article
• ISSN: 1047-6938
• DOI: 10.1364/OPN.13.12.000017