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Three-dimensional imaging of nanovoids in copper interconnects using incoherent bright field tomography

✍ Scribed by Ercius, Peter; Weyland, Matthew; Muller, David A.; Gignac, Lynne M.

Book ID
111654108
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
339 KB
Volume
88
Category
Article
ISSN
0003-6951

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