Three-dimensional Imaging of Nano-Voids in Copper Interconnects using Incoherent Bright Field (IBF) Tomography

✍ Scribed by Ercius, PA; Muller, DA; Weyland, M; Gignac, LM

• Book ID: 111863478
• Publisher: Cambridge University Press
• Year: 2006
• Tongue: English
• Weight: 228 KB
• Volume: 12
• Category: Article
• ISSN: 1431-9276
• DOI: 10.1017/s1431927606062805