Three-dimensional characterization of extreme ultraviolet mask blank defects by interference contrast photoemission electron microscopy

✍ Scribed by Lin, Jingquan; Weber, Nils; Escher, Matthias; Maul, Jochen; Han, Hak-Seung; Merkel, Michael; Wurm, Stefan; Schönhense, Gerd; Kleineberg, Ulf

• Book ID: 115409870
• Publisher: Optical Society of America
• Year: 2008
• Tongue: English
• Weight: 422 KB
• Volume: 16
• Category: Article
• ISSN: 1094-4087
• DOI: 10.1364/OE.16.015343