Three-Component Negative-Type Photoresist Based on Calix[4]resorcinarene, a Cross-linker, and a Photoacid Generator

✍ Scribed by Ueda, Mitsuru; Takahashi, Daisuke; Nakayama, Tomonari; Haba, Osamu

• Book ID: 126028693
• Publisher: American Chemical Society
• Year: 1998
• Tongue: English
• Weight: 220 KB
• Volume: 10
• Category: Article
• ISSN: 0897-4756
• DOI: 10.1021/cm980166n