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Third dimension of proximity effect correction (PEC)

✍ Scribed by Nezih Unal; Diana Mahalu; Olga Raslin; Daniel Ritter; Christoph Sambale; Ulrich Hofmann

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
332 KB
Volume
87
Category
Article
ISSN
0167-9317

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