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Thin sensitive organic membranes on selective iron-ion sensors

โœ Scribed by R. Mlika; H. Ben Ouada; R. Kalfat; G. Gamoudi; F. Mhenni; N. Jaffrezic-Renault


Book ID
117543276
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
439 KB
Volume
90
Category
Article
ISSN
0379-6779

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We report the first lmplementatlon of a double-polyslhcon thermopde gas flow sensor m an mdustrlal CMOS process The sensor uses the Seebeck effect between n-doped and p-doped polyslllcon as provided by the CMOS process In order to prevent a pqunctlon between the two matenals the polyslhcon lmes are