A high sensitivity CMOS gas flow sensor on a thin dielectric membrane

✍ Scribed by David Moser; Henry Baltes

• Book ID: 103959341
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 996 KB
• Volume: 37-38
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(93)80008-5

✦ Synopsis

We report the first lmplementatlon of a double-polyslhcon thermopde gas flow sensor m an mdustrlal CMOS process The sensor uses the Seebeck effect between n-doped and p-doped polyslllcon as provided by the CMOS process In order to prevent a pqunctlon between the two matenals the polyslhcon lmes are connected through alummmm contacts Thermal lsolatlon IS achieved by placing the thermopde on a thm silicon droxlde membrane Sensttlvlty with respect to nitrogen flow velocity and heatmg power IS 0 36 mV/sccm/mW m the lmear range, 1 e one order of magnitude better than our previous CMOS polyslhcon/alummmm thermoplle sensors (Sensors and