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High-sensitivity optical humidity sensor based on a thin dielectric waveguide

โœ Scribed by Ribeiro, R. A. S. ;Domenegueti, J. F. M. ;Zilio, S. C.

Book ID
123617834
Publisher
The Optical Society
Year
2013
Tongue
English
Weight
430 KB
Volume
52
Category
Article
ISSN
1559-128X

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We report the first lmplementatlon of a double-polyslhcon thermopde gas flow sensor m an mdustrlal CMOS process The sensor uses the Seebeck effect between n-doped and p-doped polyslllcon as provided by the CMOS process In order to prevent a pqunctlon between the two matenals the polyslhcon lmes are