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Thin plasma-polymerized layers of hexamethyldisiloxane for humidity sensor development

✍ Scribed by N. Guermat; A. Bellel; S. Sahli; Y. Segui; P. Raynaud


Book ID
108290374
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
671 KB
Volume
517
Category
Article
ISSN
0040-6090

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Effect of plasma polymerization conditio
✍ E Radeva; L Spassov πŸ“‚ Article πŸ“… 1998 πŸ› Elsevier Science 🌐 English βš– 302 KB

The humidity sorptive powers of polymer coatings deposited on quartz resonators has been studied. The polymer was obtained from hexamethyldisiloxane by plasma polymerization under different operating conditions of glow discharge current density, gas phase pressure, polymer film thickness and modific