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Thin metal and SiOx films deposited by the anodic vacuum arc technique

✍ Scribed by P. Markschläger; G. Kampschulte; M. Eckel; O. Morlok


Book ID
107930531
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
474 KB
Volume
74-75
Category
Article
ISSN
0257-8972

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