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Thin films of YBaCuO grown in-situ by co-evaporation and plasma oxidation

✍ Scribed by A.B. Berezin; S. Pan; E. Ogawa; R.M. Silver; A.L. De Lozanne


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
119 KB
Volume
162-164
Category
Article
ISSN
0921-4534

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In situ growth of YBaCuO films by ion
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High quality Y-Ba-Cu-O superconducting thin films were fabricated in situ on ZrO 2 substrates by ion beam sputtering assisted by a molecular oxygen source. Films were characterized by X-ray diffraction, resistivity measurements and scanning electron microscopy. As-deposited films were highly oriente