In situ growth of YBaCuO films by ion beam sputtering

✍ Scribed by Jianhua Hao; Xingrong Zhao; Fangqiao Zhou; Xinjian Yi; Zaiguang Li

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 322 KB
• Volume: 22
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/0921-5107(94)90239-9

✦ Synopsis

High quality Y-Ba-Cu-O superconducting thin films were fabricated in situ on ZrO 2 substrates by ion beam sputtering assisted by a molecular oxygen source. Films were characterized by X-ray diffraction, resistivity measurements and scanning electron microscopy. As-deposited films were highly oriented and exhibited a zero resistance at 88 K and critical current density Jc (77 K) of 106 A cm-2. A large diameter powder target was advantageous for adjusting the film composition and improving film uniformity. We demonstrate that by using ion beam sputtering, in situ Y-Ba-Cu-O films, which are equal to or better in film quality than those produced with laser ablation and magnetron sputtering, can be deposited.