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Growth of ultrathin YBaCuO films by an off-axis rf sputtering technique

✍ Scribed by H.C. Yang; Y.L. Ding; M.H. Chou; H.E. Horng


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
205 KB
Volume
185-189
Category
Article
ISSN
0921-4534

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High quality Y-Ba-Cu-O superconducting thin films were fabricated in situ on ZrO 2 substrates by ion beam sputtering assisted by a molecular oxygen source. Films were characterized by X-ray diffraction, resistivity measurements and scanning electron microscopy. As-deposited films were highly oriente