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Thin films of separated isotopes by cathodic sputtering

โœ Scribed by L.B. Warner


Book ID
107830665
Publisher
Elsevier Science
Year
1961
Weight
160 KB
Volume
14
Category
Article
ISSN
0029-554X

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Synthesis and characterization of titani
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Thin films of titanium hydride were obtained by reactive cathodic sputtering with a titanium target using different compositions of a mixture of hydrogen and argon as sputtering gas. The layered material is quite different from the bulk material: only a poorly crystallized phase with formula Till,.