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Thin films generated by plasma immersion ion implantation and deposition of hexamethyldisilazane mixed with nitrogen in different proportions

✍ Scribed by Kodaira, F V P; Mota, R P; Hills, V A; Honda, R I; Kayama, M E; Kostov, K G; Algatti, M A

No coin nor oath required. For personal study only.

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