Thin-film SiC as an optical and optoelectronic material
✍ Scribed by Krötz, G.; Müller, G.; Derst, G.; Wilbertz, Ch.; Kalbitzer, S.
- Book ID
- 122714600
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 700 KB
- Volume
- 3
- Category
- Article
- ISSN
- 0925-9635
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## Abstract SiC film was deposited by electron beam‐physical vapor deposition on thermal oxidized silicon substrates at 750°C, and SiC/SiO~2~ composite thin film was prepared. The obtained composite film was analyzed by Fourier‐transform infrared (FTIR) transmission and reflection spectroscopy, and