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Thin film reaction and interface structure of Cu on (111)Si

✍ Scribed by Echigoya, J.; Satoh, T.; Ohmi, T.

Book ID
122039097
Publisher
Elsevier Science
Year
1993
Weight
838 KB
Volume
41
Category
Article
ISSN
0956-7151

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## Abstract The metal/semiconductor interface region of __in situ__ deposited Ag thin films prepared on a Si(111) substrate has been investigated using AES sputter depth profiling in conjunction with proton‐induced x‐ray emission (PIXE). Interface regions have been modeled with the interface analys