Thin Film Polycrystalline Silicon Solar Cells Prepared by Plasma CVD
β Scribed by Reehal, H. S. ;Thwaites, M. J. ;Bruton, T. M.
- Publisher
- John Wiley and Sons
- Year
- 1996
- Tongue
- English
- Weight
- 653 KB
- Volume
- 154
- Category
- Article
- ISSN
- 0031-8965
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
## Abstract Thinβfilm polycrystalline silicon solar cells have been fabricated on various substrates, such as inactive P^++^ monoβcrystalline silicon substrates, p^++^ monoβSi substrates covered by thermally oxidized SiO~2~ and ceramic substrates by means of a rapid thermal chemical vapour depositi
## Abstract In this work, the mechanisms of reactive thermal CVD are discussed and the influences of various deposition parameters on crystallinity, composition, uniformity and reproducibility are clarified. Based on optimization of deposition parameters, we obtained deviceβgrade polycrystalline Si