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Thin-film platinum for appliance temperature control

✍ Scribed by Clayton, W.A.

Book ID
117863518
Publisher
IEEE
Year
1988
Tongue
English
Weight
571 KB
Volume
24
Category
Article
ISSN
0093-9994

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In this paper we report on structural and electrical properties of thin films of Pt with Ti, Ta, or no adhesion, which were annealed in different ambient at temperatures in the range 400-950 β€’ C. Correlations are made between the mechanical strain and grain size values obtained from X-ray diffractio