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Thin-film piezoelectric MEMS

✍ Scribed by Eom, Chang-Beom; Trolier-McKinstry, Susan

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Thin Film Piezoelectrics for MEMS

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✍ S. Marauska, V. Hrkac, T. Dankwort, R. Jahns, H. J. Quenzer, R. Knöchel, L. Kien 📂 Article 📅 2012 🏛 Springer-Verlag 🌐 English ⚖ 837 KB

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✍ Seong Kon Kim; Cheol-Su Kim; Kyung Wha Lee; Sang Yeol Lee 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 291 KB

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✍ Chengkuo Lee; Fu-Li Hsiao; Kobayashi, T.; Kah How Koh; Ramana, P.V.; Wenfeng Xia 📂 Article 📅 2009 🏛 IEEE 🌐 English ⚖ 645 KB

Low-temperature thin-film silicon MEMS

✍ J.P. Conde; J. Gaspar; V. Chu 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 715 KB