An overview of ion and plasma assisted techniques for optical thin films is given. The individual deposition methods are described and their specific advantages and drawbacks with respect to optical thin film deposition presented. It is shown that ion and plasma assistance can have also unwelcome si
β¦ LIBER β¦
Thin film optical waveguides fabricated by ion- assisted techniques
β Scribed by C.W. Pitt
- Publisher
- Elsevier Science
- Year
- 1981
- Tongue
- English
- Weight
- 608 KB
- Volume
- 86
- Category
- Article
- ISSN
- 0040-6090
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