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Thin film micromachined structures for large-area applications

✍ Scribed by M Boucinha; V Chu; J.P Conde

Book ID: 117150473
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 167 KB
Volume: 266-269
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(99)00948-5

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