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Stress control in thin sputtered films towards potential application in micromachined structures

✍ Scribed by S Stadler; P.K Ajmera

Book ID: 117358419
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 194 KB
Volume: 35
Category: Article
ISSN: 0167-577X
DOI: 10.1016/s0167-577x(97)00223-1

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