✦ LIBER ✦

Thin film micro carbon dioxide sensor using MEMS process

✍ Scribed by Yeung-Il Bang; Kap-Duk Song; Byung-Su Joo; Jeung-Soo Huh; Soon-Don Choi; Duk-Dong Lee

Book ID: 108263136
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 466 KB
Volume: 102
Category: Article
ISSN: 0925-4005
DOI: 10.1016/j.snb.2003.11.039

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Use of cadmium selenide thin films as a

Use of cadmium selenide thin films as a carbon dioxide gas sensor

✍ N. G. Patel; C. J. Panchal; K. K. Makhija 📂 Article 📅 1994 🏛 John Wiley and Sons 🌐 English ⚖ 317 KB 👁 2 views

Indium sesquitelluride (In2Te3) thin fil

Indium sesquitelluride (In2Te3) thin film gas sensor for detection of carbon dioxide

✍ R.R. Desai; D. Lakshminarayana; P.B. Patel; C.J. Panchal 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 241 KB

Conducting Plasma Polymerized Polypyrrol

Conducting Plasma Polymerized Polypyrrole Thin Films as Carbon Dioxide Gas Sensors

✍ Jose Luis Yagüe; Salvador Borrós 📂 Article 📅 2012 🏛 John Wiley and Sons 🌐 English ⚖ 384 KB

Breath-by-breath measurement of carbon d

Breath-by-breath measurement of carbon dioxide using a plastic film optical sensor

✍ Andrew Mills; Anne Lepre; Lorraine Wild 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 747 KB

Design and fabrication of micro hydrogen

Design and fabrication of micro hydrogen gas sensors using palladium thin film

✍ Jin-Ho Yoon; Bum-Joon Kim; Jung-Sik Kim 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 870 KB

Fabrication of carbon dioxide gas sensor

Fabrication of carbon dioxide gas sensor and its alarm system using indium tin oxide (ITO) thin films

✍ N.G. Patel; K.K. Makhija; C.J. Panchal 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 440 KB

Indmm bn oxtde (ITO) polycrystalhoe thm films grown on alumma substrates by thermal evaporation, followed by annealing m a humld envnonment, are used for fabncatmg a gas sensor to detect carbon duxude (CO,) gas produced by incomplete burning m domestlc combustion equipment and combustion processes I