Fabrication of carbon dioxide gas sensor and its alarm system using indium tin oxide (ITO) thin films

✍ Scribed by N.G. Patel; K.K. Makhija; C.J. Panchal

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 440 KB
• Volume: 21
• Category: Article
• ISSN: 0925-4005
• DOI: 10.1016/0925-4005(94)01247-4

✦ Synopsis

Indmm bn oxtde (ITO) polycrystalhoe thm films grown on alumma substrates by thermal evaporation, followed by annealing m a humld envnonment, are used for fabncatmg a gas sensor to detect carbon duxude (CO,) gas produced by incomplete burning m domestlc combustion equipment and combustion processes IT0 thm-6lm gas sensors with a thrckness of about 150 nm show a maxunum senatlvlty when operated at a temperature of 573 K for vanous concentrations of CO2 gas A tentatlve mechamsm based on molecular orbIta (MO) theory IS proposed for the role of CO2 gas m mcreasmg the conductance of IT0 thm-film gas sensors This increase m conductance IS utdlzed to mltlate the tnggenng of an electromc alarm system ~&WV& IT0 thm films, Carbon dmxlde gas sensor