Thin film growth using a high-current, mass-separated low energy ion beam deporstion system

✍ Scribed by N. Sasaki; S. Shimizu; S. Ogata

• Book ID: 113205291
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 631 KB
• Volume: 281-282
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(96)08606-3