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Thin Film Growth of Germanium Selenides from PECVD of GeCl4and Dimethyl Selenide

✍ Scribed by Patrick J. Whitham; Dennis P. Strommen; Lisa D. Lau; René G. Rodriguez

Book ID
106491080
Publisher
Springer
Year
2010
Tongue
English
Weight
228 KB
Volume
31
Category
Article
ISSN
0272-4324

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## Abstract Semiconducting thin films of cadmium selenide have been grown by conventional thermal evaporation technique. The effect of various growth parameters like rate of deposition and deposition temperature has been studied in detail. Films deposited at room temperature are cadmium rich with s