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Thin film growth of boron nitride on α-Al2O3 (0 0 1) substrates by reactive sputtering

✍ Scribed by Atsushi Anzai; Fumitaka Nishiyama; Shoji Yamanaka; Kei Inumaru

Book ID: 113787470
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 456 KB
Volume: 46
Category: Article
ISSN: 0025-5408
DOI: 10.1016/j.materresbull.2011.09.006

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Thin film growth of boron nitride on α-Al2O3 (0&#xa0;0&#xa0;1) substrates by reactive sputtering

Thin film growth of boron nitride on α-Al2O3 (0 0 1) substrates by reactive sputtering