Thin-film yttria-stabilized tetragonal z
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Bor Yann Liaw; Richard E. Rocheleau; Qing-Hua Gao
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Article
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1996
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Elsevier Science
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English
⚖ 478 KB
Yttria-stabilized zirconia thin films deposited by radio-frequency sputtering from a 3 mol% Y,O,/ZrO, target show primarily tetragonal orientation. Annealing in air further reduces the fraction of monoclinic phase and enhances the crystallinity of the tetragonal phase. Films annealed at 700°C for 2