𝔖 Bobbio Scriptorium
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Thin film dielectrics—The future

✍ Scribed by Robert M. Hill


Publisher
Elsevier Science
Year
1983
Tongue
English
Weight
276 KB
Volume
100
Category
Article
ISSN
0040-6090

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Parallel synthesis together with highthroughput screening was used to identify candidate materials for integrated circuit applications that demand a superior high permittivity dielectric thin film. Specifically, we developed a "continuouscomposition spread" (CCS) technique to synthesize much of a ps