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Thickness monitoring of optical thin films. (GB)


Book ID
108390156
Publisher
Elsevier Science
Year
1980
Tongue
English
Weight
167 KB
Volume
30
Category
Article
ISSN
0042-207X

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An optical thin film thickness monitor
โœ V.T. Chitnis; P.N. Puntambekar ๐Ÿ“‚ Article ๐Ÿ“… 1981 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 210 KB

A modified technique for optical monitoring of the quarter-wave stacks of dielectric materials, utilising the principle of wavelength modulation and phase sensitive detection, is suggested. The accuracy and the sensitivity of the method is very high and can be used for making the coating process sel