An optical thin film thickness monitor

✍ Scribed by V.T. Chitnis; P.N. Puntambekar

• Publisher: Elsevier Science
• Year: 1981
• Tongue: English
• Weight: 210 KB
• Volume: 31
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(81)80167-4

✦ Synopsis

A modified technique for optical monitoring of the quarter-wave stacks of dielectric materials, utilising the principle of wavelength modulation and phase sensitive detection, is suggested. The accuracy and the sensitivity of the method is very high and can be used for making the coating process self-controlled and programmable.