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Thickness measurements on transparent substrates based on reflection ellipsometry I Optical effects of high-refractive-index additional layers

✍ Scribed by Otsuki, Soichi ;Ohta, Koji ;Tamada, Kaoru ;Wakida, Shin-ichi

Book ID: 115352353
Publisher: The Optical Society
Year: 2005
Tongue: English
Weight: 162 KB
Volume: 44
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.44.005910

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