Thickness determination of thin SiO2 on silicon : H. Reisinger, H. Oppolzer and W. Honlein. Solid-St. Electron. 35, 797 (1992)

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 134 KB
• Volume: 32
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(92)90412-e