Thickness dependent soft-breakdown phenomena of low dielectric constant thin films and corresponding activation energy

✍ Scribed by Shih-Wei Lee; Hyungkun Kim; Frank G Shi; Bin Zhao

• Book ID: 108360832
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 182 KB
• Volume: 33
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/s0026-2692(02)00036-8