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Thickness dependence of stress in lead titanate thin films deposited on Pt-coated Si

✍ Scribed by Fu, Desheng; Ogawa, Takeshi; Suzuki, Hisao; Ishikawa, Kenji


Book ID
120535279
Publisher
American Institute of Physics
Year
2000
Tongue
English
Weight
266 KB
Volume
77
Category
Article
ISSN
0003-6951

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