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Thickness dependence of optical properties of hydrogenated amorphous silicon films

✍ Scribed by R. Sridhar; R. Venkattasubbiah; J. Majhi; R. Ramachandran


Book ID
115987383
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
452 KB
Volume
119
Category
Article
ISSN
0022-3093

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We report results obtained from optical absorption studies carried out on amorphous silicon thin films deposited by plasma-enhanced chemical vapour deposition (PECVD) from silane plasma. The influence of the film thickness was studied on the two series of samples deposited from undiluted silane and