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Thickness dependence of dielectric properties in BaTiO3 films fabricated by aerosol deposition method

โœ Scribed by J.M. Oh; N.H. Kim; S.C. Choi; S.M. Nam

Book ID
108215638
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
1001 KB
Volume
161
Category
Article
ISSN
0921-5107

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Lead zirconate titanate (PZT) thick films have been successfully grown on Pt/Ti-coated (1 0 0) Si substrates by a novel aerosol plasma deposition (APD) method at room temperature. The dielectric constant (K) and loss tangent (tan ฮด) of the as-deposited film measured at 100 kHz are 223 and 0.034, res