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Thickness Control of Thin Films

✍ Scribed by VAN HEEL, A. C. S.


Book ID
115378784
Publisher
Optical Society of America
Year
1957
Weight
68 KB
Volume
47
Category
Article
ISSN
0030-3941

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Control of the thickness distribution of
✍ R. Schmidt; M. Parlak; A.W. Brinkman πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 557 KB

In this work the thickness distribution of NTC thermistor thin films produced by low deposition rate (0.8 nm s -1 ) electron-beam evaporation is investigated. The target preparation, deposition conditions and geometrical set-up of the evaporation mechanism are described in detail. The evaporation ge