Thick film patterning by lift-off process using double-coated single photoresists

✍ Scribed by Yifeng Fu; Li-Lei Ye; Johan Liu

• Book ID: 113795614
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 658 KB
• Volume: 76
• Category: Article
• ISSN: 0167-577X
• DOI: 10.1016/j.matlet.2012.02.027