✦ LIBER ✦
Formation of thick and narrow-spacing metal patterns by lift-off technique using negative photoresists, LMR and LMR-UV
✍ Scribed by Yoshio Yamashita; Ryuji Kawazu; Toshio Itoh; Kazutami Kawamura; Seigo Ohno; Kenji Kobayashi; Takateru Asano; Gentaro Nagamatsu
- Book ID
- 103597823
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 278 KB
- Volume
- 3
- Category
- Article
- ISSN
- 0167-9317
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