𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Thermomechanical modeling of an actuated micromirror

✍ Scribed by J. Funk; J. Bühler; J.G. Korvink; H. Baltes

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
535 KB
Volume
47
Category
Article
ISSN
0924-4247

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