Two degree-of-freedom micromirror actuation using thermocapillary effect in liquid droplets

✍ Scribed by Rakesh K. Dhull; Lynn Fuller; Pei-Chun Kao; Ying-Chih Liao; Yen-Wen Lu

• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 719 KB
• Volume: 168
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/j.sna.2011.03.041