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Thermoelectric cooling effect in a p-Sb2Te3−n-Bi2Te3 thin film thermocouple

✍ Scribed by N.G. Patel; P.G. Patel

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
215 KB
Volume
35
Category
Article
ISSN
0038-1101

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The techniques of micromachining are used for the manufacturing of a thermal inclinometer, which requires no solid proof mass and has a low-cost production. The sensor principle is as follows: a heating resistor creates a symmetrical temperature profile and two thermocouples, placed symmetrically on