✦ LIBER ✦

Thermodynamic Calculations for the Chemical Vapor Deposition of Silicon Nitride

✍ Scribed by ANGUS I. KINGON; LEONARD J. LUTZ; ROBERT F. DAVIS

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Thermodynamic Calculations for the Chemi

✍ ANGUS I. KINGON; LEONARD J. LUTZ; P. LIAW; ROBERT F. DAVIS 📂 Article 📅 1983 🏛 John Wiley and Sons 🌐 English ⚖ 936 KB

Thermodynamic Calculations on the Chemic

✍ Frank Einar Kruis; Brian Scarlett; Robert A. Bauer; Joop Schoonman 📂 Article 📅 1992 🏛 John Wiley and Sons 🌐 English ⚖ 848 KB

Chemical vapor deposition of titanium–si

✍ Smith, Paul Martin; Custer, J. S. 📂 Article 📅 1997 🏛 American Institute of Physics 🌐 English ⚖ 490 KB

Oxidation of Chemically-Vapor-Deposited

✍ Doo J. Choi; David B. Fischbach; William D. Scott 📂 Article 📅 1989 🏛 John Wiley and Sons 🌐 English ⚖ 607 KB

Low-Temperature Metal-Organic Chemical V

✍ Honghua Du; Bernard Gallois; Kenneth E. Gonsalves 📂 Article 📅 1990 🏛 John Wiley and Sons 🌐 English ⚖ 315 KB

Hybrid-excitation chemical vapor deposit

✍ Shigeichi Yamamoto; Masatoshi Migitaka 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 399 KB