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Thermodynamic approach to the CHO deposition diagram in the diamond chemical vapour deposition process

✍ Scribed by Hwang, Nong M.; Hahn, Jun H.; Bahng, Gun W.


Book ID
122558004
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
476 KB
Volume
3
Category
Article
ISSN
0925-9635

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