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Thermodynamic approach to the chemical vapor deposition process

✍ Scribed by Nong M. Hwang; Duk Y. Yoon

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 609 KB
Volume: 143
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(94)90372-7

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